Structures and Applications of Guide for FA For Z axis stage & FA parts

Flange type Z-ax is guide: the most suitable for elevating stage

HEADWAY's Flange type Z-ax is guide is specifically designed for Z-axis elevating stage. The guide column employs a high-precision needle roller support structure, providing:

• High rigidity: Effectively suppresses off-center loads and structural deformation, maintaining stable guidance.
• Low vibration: Reduces vibration transmission during high-speed motion, enhancing positioning stability.
• High precision retention: Maintains accurate repeat positioning over extended operation.
• Flange structure for easy installation: Shortens assembly time and enhances overall system design flexibility.

This design not only enhances guiding performance but also ensures dynamic stability and durability for the entire system. It guarantees smooth lifting and precise alignment even in high-speed environments, meeting the demands of demanding automation applications.

Inspection Device

High rigidity and low vibration make the camera statically determinate quicker, and lead to shorter cycle time.

Precision Z stage for the exposure equipment

Accuracy improvement enables sub-micron order positioning.

Z stage for the prober

Higher guide rigidity reduces the deflection caused by the offset load on the stage.